Scanning Electron Microscopy


Microscope
SE Imaging
BSE Imaging
EBSD Capability
Low Vacuum Capability
Notes
FEI Magellan
0⬤⬤⬤⬤⬤
1⬤⬤⬤⬤
1⬤⬤⬤⬤
2⬤⬤⬤
5
FEI Quanta 200
3⬤⬤
5?
5?
5
3⬤⬤
FEI Quanta 250
2⬤⬤⬤
5?
5?
5
2⬤⬤⬤
FEI Quanta 650
2⬤⬤⬤
2⬤⬤⬤
2⬤⬤⬤
3⬤⬤
2⬤⬤⬤
FEI Quanta 650 QEMSCAN
2⬤⬤⬤
2⬤⬤⬤
2⬤⬤⬤
5
2⬤⬤⬤
TS Apreo 2C
1⬤⬤⬤⬤
1⬤⬤⬤⬤
3⬤⬤
1⬤⬤⬤⬤
5
Tescan Mira3 LC
2⬤⬤⬤
2⬤⬤⬤
2⬤⬤⬤
1⬤⬤⬤⬤
2⬤⬤⬤
Tescan Mira3 SC
2⬤⬤⬤
2⬤⬤⬤
3⬤⬤
5
2⬤⬤⬤
Tescan Vega3
3⬤⬤
3⬤⬤
5
5
3⬤⬤
Zeiss Merlin
0⬤⬤⬤⬤⬤
3⬤⬤
0⬤⬤⬤⬤⬤
2⬤⬤⬤
5
Zeiss Sigma
1⬤⬤⬤⬤
2⬤⬤⬤
1⬤⬤⬤⬤
2⬤⬤⬤
2⬤⬤⬤
Zeiss Ultra 55
2⬤⬤⬤
2⬤⬤⬤
4
4
5